Room Temperature Spalling of Thin Silicon Foils Using a Kerfless Technique

Room temperature multiplexed gas sensing using chemical-sensitive 3.5-nm-thin silicon transistors

There is great interest in developing a low-power gas sensing technology that can sensitively and selectively quantify the chemical composition of a target atmosphere. Nanomaterials have emerged as extremely promising candidates for this technology due to their inherent low-dimensional nature and high surface-to-volume ratio. Among these, nanoscale silicon is of great interest because pristine ...

Plasma anodization of silicon at room temperature

2014 Room temperature plasma anodization of silicon (growth rate of a few nm/min.) is possible through a thin calcia stabilized zirconia (CSZ) layer. The anodization kinetics, the composition and the electrical properties of the anodic SiO2 films are studied. Constant voltage or low current anodization lead to quasi defect free films with reduced surface roughness. The dielectric breakdown fiel...

Kerfless Wafering: Porous Silicon Reorganization and Epitaxial Silicon Growth

Room-Temperature Humidity Sensing Using Graphene Oxide Thin Films

In this article, we report on a room-temperature humidity sensing device using graphene oxide (GO) thin films synthesized by chemical exfoliation. Changes in the device conductivity are measured for varying relative humidity in the experimental chamber. Experiments are carried out for relative humidity varying from 30% to 95%. We observe a difference in the results obtained for low relative hum...

Room temperature reactions involving silicon dangling bond centers and molecular hydrogen in amorphous SiO2 thin films on silicon

When metal/oxide/silicon (MOS) devices are subjected to ionizing radiation, hot carrier damage, or any process in which charge carriers are present in the oxide, interface states are created at the Si/SiO, interfaceelm The presence of holes in the oxide is most effective in triggering the interface state generation process.879 Studies of the transient response of irradiated devices shows that m...